CPU production how to choose no oil and water lubrication air compressor
CPU (central processing unit) is the core component of modern electronic equipment, and its production involves complex processes such as nano-scale precision lithography, etching, deposition, cleaning and packaging. In this process, the compressed air system is the key infrastructure to maintain the clean room environment, drive the precision equipment and control the process gas. Based on international standards (such as ISO 8573-1, SEMI F5, IEC 60034-30), this paper analyzes the necessity and selection strategy of oil-free water lubrication air compressor in CPU production from the perspective of technical parameters, process requirements and economic benefits.
Strict requirements of 1. CPU production process for compressed air
1. Photolithography Process (Photolithography)
- demand: The pneumatic components of the lithography machine need to be driven by oil-free air, and oil residue will cause lens contamination and reduce lithography resolution.
- Standard: ISO 8573-1 Class 0 (oil content ≤ 0.01 mg/m), particulate matter grade ≤ Class 1 (particle size ≤ 0.1 μm).
2. Etching & Deposition (Etching & CVD/PVD)
- demand: The plasma reaction chamber requires ultra-pure process gas (e. g. NFover, SiH?), and oil and hydrocarbons can cause side reactions, resulting in film defects.
- Standard SEMI F5 (total hydrocarbon content THC<0.1 ppm).
3. Wafer cleaning (Wafer Cleaning)
- demand: Compressed air is used to dry wafers, and oil or water stains will form micron-level defects.
- Parameters pressure dew point ≤-40 ℃(ISO 8573-1 Class 2), relative humidity <1%.
4. Packaging and Testing (Packaging & Testing)
- demand: The pneumatic manipulator needs to stabilize the air pressure (± 0.1 bar fluctuation), and the oil content may cause the seal to age.
Core Selection Parameters of 2. Oil-free Water Lubrication Air Compressor
according to IEC 60034-30 energy efficiency standards and ISO 1217 performance test specifications, CPU production scenarios need to pay attention to the following technical indicators:
| parameter Category | technical Standards | recommend value |
|---|---|---|
| displacement (FAD) | ISO 1217 Annex C | according to the total process demand + 20% redundancy design |
| pressure rating | ISO 5389 | 7-10 bar (customized according to equipment requirements) |
| dew point temperature | ISO 8573-1 Class 2 | ≤-40 ℃ |
| particulate Grade | ISO 8573-1 Class 1 | particle size ≤ 0.1 μm |
| oil content | ISO 8573-1 Class 0 | ≤0.01 mg/m³ |
| energy efficiency grade | IEC 60034-30 IE4/IE5 | permanent magnet synchronous motor + frequency conversion control |
| noise level | ISO 2151 | ≤75 dB(A) @ 1 m |
special requirements:
- corrosion resistant design: The water lubricated rotor should be ceramic coated or titanium alloy (ASTM B265 Grade 2) to avoid chloride ion corrosion in the cooling water.
- heat recovery system: Integrated ISO 50001 compatible heat exchanger, recovering more than 90% of compression heat for pure water preheating.
Risks and Consequences of Using Oil Compressors in 3.
- Yield Decrease: Oil mist contaminates photoresist or wafer surface, resulting in an increase in defect density (Defect Density) and a yield loss of 5%-15%.
- Equipment failure: Oil accumulates in the vacuum pump or MFC (mass flow controller), causing sensor drift or valve jam.
- Surge in maintenance costs: Additional activated carbon filter is required (when C ≤ 0.01 mg/m³, annual maintenance cost increases by $15,000/unit).
- Environmental violations: Oily condensate should be treated according to EPA 40 CFR Part 441, otherwise it will face heavy fines.
- brand reputation risk: Does not meet SEMI S2/S8 EHS standard, affecting customer supply chain audit.
Comprehensive income of 4. oil-free water lubrication air compressor
- yield improvement: The air purity meets the Class 0 standard, and the defect rate is reduced to <0.1 defects/cm²(SEMI M49).
- Equipment life extension: To avoid the erosion of oil on precision bearings and seals, MTBF (mean time to failure) increased by 30%.
- Operational cost optimization:
- energy saving: IE5 motor + frequency conversion technology, energy saving 15%-25% compared with oil machine.
- No filter element replacement: eliminate the three-stage oil filter (annual savings of $8,000/unit).
- Environmental Compliance condensate water can be discharged directly (pH 6.5-7.5, oil-free), in line with ISO 14001 system.
- technical competitiveness support TS 16949 certification to meet advanced process requirements below 3nm.
5. Oil-free Water Lubrication vs Oil Air Compressor: Comparison of Key Indicators
| contrast dimension | air compressor without oil and water lubrication | air compressor with oil |
|---|---|---|
| air purity | Class 0 (zero oil content) | Class 1-3 (post-processing required) |
| dew point control | built-in drying module (-40 ℃) | relying on external adsorption dryer |
| maintenance frequency | 2,000 hours/time (only check bearings) | 500 hours/time (oil change + filter element) |
| life cycle cost | low (no consumables) | high (oil + filter element accounts for 40% of TCO) |
| noise level | ≤75 dB(A) | 85-95 dB(A) |
| applicable Scenarios | semiconductor, Medicine, Food | general Manufacturing |
6. Conclusion
in CPU production, the oil-free water-lubricated air compressor has become the core equipment for ensuring yield, reducing TCO (total cost of ownership) and realizing green manufacturing through its zero pollution, high energy efficiency and low maintenance characteristics. Enterprises need to strictly match process parameters (e. g. dew point, flow volatility) and give priority to ISO 8573-1/SEMI F5 certified solutions to meet the increasingly stringent process requirements under Moore’s Law.
